Project commenced in 2006, completed in 2007.
TANGRAM
| Customer: ASML |
|
| Model-based Diagnosis for lithography systems |
ASML is the leading manufacturer of lithography systems for the semiconductor industry. This industry demands rapid innovation, short time-to-market, and high availability. To reduce test and integration time, and operational downtime, ASML needs fast and efficient methods to troubleshoot and diagnose its systems.
Model-Based Diagnosis (MBD) is a method that provides fast and efficient diagnosis. In MBD, a diagnosis is automatically inferred from a compositional, functional model and real-world observations. MBD is faster and less error-prone than human reasoning. In contrast to symptom based methods, MBD captures correct system functionality and therefore isolates all faults that cause deviating system functionality, including unknown ones. MBD also adapts better to evolving system design as models are derived from that design.
In cooperation with Delft University of Technology and the Embedded Systems Institute, S[&]T has successfully demonstrated MBD, implemented with the LYDIA toolset. This has culminated in the development of a model-based Board Dump tool that reduces the diagnosis time of the ASML wafer stage subsystem from hours to mere minutes.